Sensing gas type and pressure with multipurpose device based on seebeck effect
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The aim of this work was to experimentally explore possibility of gas type and pressure detection using ICTM multipurpose device based on Seebeck effect. For this purpose, experimental procedure was established which allowed testing in the pressure range (2· 102-2·103) Pa. Thermopile voltage was measured in the atmosphere of argon, carbon dioxide and helium. Experimental results justified to some extent simulation data. It was proven that output voltage can serve both for gas type and gas pressure detection.
Keywords:Vacuum. / Transducer / Thermopile / Pressure sensor / Gas sensor
Source:Proceedings of the International Semiconductor Conference, CAS, 2019, 2019-October, 79-82
- Institute of Electrical and Electronics Engineers Inc.