Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer
Само за регистроване кориснике
2018
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems.
Кључне речи:
Temperature sensor / Temperature measurement / SensorИзвор:
Proceedings of the International Semiconductor Conference, CAS, 2018, 2018-October, 295-297Издавач:
- Institute of Electrical and Electronics Engineers Inc.
Финансирање / пројекти:
- Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине (RS-MESTD-Technological Development (TD or TR)-32008)
- Мерења у концепту ""паметне"" дистрибутивне мреже (RS-MESTD-Technological Development (TD or TR)-32019)
Институција/група
Fakultet informacionih tehnologijaTY - CONF AU - Sarajlić, Milija AU - Frantlović, Miloš AU - Poljak, Predrag AU - Radulović, K. AU - Vasiljević-Radović, Dana PY - 2018 UR - https://redun.educons.edu.rs/handle/123456789/350 AB - Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems. PB - Institute of Electrical and Electronics Engineers Inc. C3 - Proceedings of the International Semiconductor Conference, CAS T1 - Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer EP - 297 SP - 295 VL - 2018-October DO - 10.1109/SMICND.2018.8539828 UR - conv_1171 ER -
@conference{ author = "Sarajlić, Milija and Frantlović, Miloš and Poljak, Predrag and Radulović, K. and Vasiljević-Radović, Dana", year = "2018", abstract = "Test of a sensor with four resistors structure on its sensitivity as a temperature probe is described. The chip is sensitive on a temperature difference between Si substrate and air and less sensitive on the temperature of the whole chip. The sensor consists out of four resistors realized as metal meanders on a silicon chip patterned in 150 nm thick gold layer whose lateral dimensions are 0.94 mm by 0.6 mm and the length 14.1 mm. Width of meander line is 0.02 mm with clearance 0.02 mm. The resistors form Wheatstone bridge configuration. Current through resistors was kept constant on 5 mA. Offset of the bridge on no temperature difference was 1.5 mV. In the case of temperature difference on the sensor surface, sensor output is changing with linear dependence. This has a potential for the use in temperature stabilization systems.", publisher = "Institute of Electrical and Electronics Engineers Inc.", journal = "Proceedings of the International Semiconductor Conference, CAS", title = "Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer", pages = "297-295", volume = "2018-October", doi = "10.1109/SMICND.2018.8539828", url = "conv_1171" }
Sarajlić, M., Frantlović, M., Poljak, P., Radulović, K.,& Vasiljević-Radović, D.. (2018). Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer. in Proceedings of the International Semiconductor Conference, CAS Institute of Electrical and Electronics Engineers Inc.., 2018-October, 295-297. https://doi.org/10.1109/SMICND.2018.8539828 conv_1171
Sarajlić M, Frantlović M, Poljak P, Radulović K, Vasiljević-Radović D. Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer. in Proceedings of the International Semiconductor Conference, CAS. 2018;2018-October:295-297. doi:10.1109/SMICND.2018.8539828 conv_1171 .
Sarajlić, Milija, Frantlović, Miloš, Poljak, Predrag, Radulović, K., Vasiljević-Radović, Dana, "Temperature Measurements with Four-Resistor Sensor Patterned on Golden Layer" in Proceedings of the International Semiconductor Conference, CAS, 2018-October (2018):295-297, https://doi.org/10.1109/SMICND.2018.8539828 ., conv_1171 .