A measurement setup enabling automatic characterization of silicon piezoresistive MEMS pressure sensors
Samo za registrovane korisnike
2017
Autori
Poljak, PredragFrantlović, Miloš
Smiljanić, M.
Lazić, Z.
Jokić, I.
Ranđelović, D.V.
Mitrović, Z.
Konferencijski prilog (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT.
Ključne reči:
pressure / MEMS sensor / measurement setup / characterizationIzvor:
Proceedings of the International Semiconductor Conference, CAS, 2017, 2017-October, 237-240Izdavač:
- Institute of Electrical and Electronics Engineers Inc.
Finansiranje / projekti:
- Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-MESTD-Technological Development (TD or TR)-32008)
- Merenja u konceptu ""pametne"" distributivne mreže (RS-MESTD-Technological Development (TD or TR)-32019)
Institucija/grupa
Fakultet informacionih tehnologijaTY - CONF AU - Poljak, Predrag AU - Frantlović, Miloš AU - Smiljanić, M. AU - Lazić, Z. AU - Jokić, I. AU - Ranđelović, D.V. AU - Mitrović, Z. PY - 2017 UR - https://redun.educons.edu.rs/handle/123456789/293 AB - In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT. PB - Institute of Electrical and Electronics Engineers Inc. C3 - Proceedings of the International Semiconductor Conference, CAS T1 - A measurement setup enabling automatic characterization of silicon piezoresistive MEMS pressure sensors EP - 240 SP - 237 VL - 2017-October DO - 10.1109/SMICND.2017.8101211 UR - conv_1177 ER -
@conference{ author = "Poljak, Predrag and Frantlović, Miloš and Smiljanić, M. and Lazić, Z. and Jokić, I. and Ranđelović, D.V. and Mitrović, Z.", year = "2017", abstract = "In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT). The main objective of the work is to make the sensor characterization experiment as efficient as possible, without sacrificing measurement performance. An example of obtained measurement results is given for 3 sensors fabricated at CMT. The work greatly facilitates small series production of pressure sensors and instruments, as well as research activities in the field of pressure sensors at CMT.", publisher = "Institute of Electrical and Electronics Engineers Inc.", journal = "Proceedings of the International Semiconductor Conference, CAS", title = "A measurement setup enabling automatic characterization of silicon piezoresistive MEMS pressure sensors", pages = "240-237", volume = "2017-October", doi = "10.1109/SMICND.2017.8101211", url = "conv_1177" }
Poljak, P., Frantlović, M., Smiljanić, M., Lazić, Z., Jokić, I., Ranđelović, D.V.,& Mitrović, Z.. (2017). A measurement setup enabling automatic characterization of silicon piezoresistive MEMS pressure sensors. in Proceedings of the International Semiconductor Conference, CAS Institute of Electrical and Electronics Engineers Inc.., 2017-October, 237-240. https://doi.org/10.1109/SMICND.2017.8101211 conv_1177
Poljak P, Frantlović M, Smiljanić M, Lazić Z, Jokić I, Ranđelović D, Mitrović Z. A measurement setup enabling automatic characterization of silicon piezoresistive MEMS pressure sensors. in Proceedings of the International Semiconductor Conference, CAS. 2017;2017-October:237-240. doi:10.1109/SMICND.2017.8101211 conv_1177 .
Poljak, Predrag, Frantlović, Miloš, Smiljanić, M., Lazić, Z., Jokić, I., Ranđelović, D.V., Mitrović, Z., "A measurement setup enabling automatic characterization of silicon piezoresistive MEMS pressure sensors" in Proceedings of the International Semiconductor Conference, CAS, 2017-October (2017):237-240, https://doi.org/10.1109/SMICND.2017.8101211 ., conv_1177 .