Analytical modelling of the transient response of thermopile-based MEMS sensors
Апстракт
This work presents an analytical model dedicated to study of the transient response of multipurpose MEMS devices based on thermopile sensors. In general, thermopile sensors response depends on ambient temperature, thermal conductivity of the gas inside the housing and the pressure of the gas. The presented model takes into account all these parameters. This model was sucessfully implemented for the study of transient behaviour of our multifunctional sensors with p+Si/Al thermocouples and a bulk micromachined bilayered membrane. Simulations were performed for different gases of interest and conclusions were deduced regarding the influence of relevant parameters on the thermal time constant. This analytical approach is general and flexible enough to be implemented for analysis of the transient behaviour of thermopile-based sensors when used for different applications.
Кључне речи:
Transient response / Thermopile / MEMS sensors / Analytical modellingИзвор:
Electronics, 2015, 19, 2, 70-73Издавач:
- University of Banja Luka, Faculty of Electrical Engineering
Институција/група
Fakultet informacionih tehnologijaTY - JOUR AU - Ranđelović, D.V. AU - Kozlov, A.G. AU - Jakšić, O.M. AU - Smiljanić, M.M. AU - Poljak, Predrag PY - 2015 UR - https://redun.educons.edu.rs/handle/123456789/253 AB - This work presents an analytical model dedicated to study of the transient response of multipurpose MEMS devices based on thermopile sensors. In general, thermopile sensors response depends on ambient temperature, thermal conductivity of the gas inside the housing and the pressure of the gas. The presented model takes into account all these parameters. This model was sucessfully implemented for the study of transient behaviour of our multifunctional sensors with p+Si/Al thermocouples and a bulk micromachined bilayered membrane. Simulations were performed for different gases of interest and conclusions were deduced regarding the influence of relevant parameters on the thermal time constant. This analytical approach is general and flexible enough to be implemented for analysis of the transient behaviour of thermopile-based sensors when used for different applications. PB - University of Banja Luka, Faculty of Electrical Engineering T2 - Electronics T1 - Analytical modelling of the transient response of thermopile-based MEMS sensors EP - 73 IS - 2 SP - 70 VL - 19 DO - 10.7251/ELS1519070R UR - conv_1185 ER -
@article{ author = "Ranđelović, D.V. and Kozlov, A.G. and Jakšić, O.M. and Smiljanić, M.M. and Poljak, Predrag", year = "2015", abstract = "This work presents an analytical model dedicated to study of the transient response of multipurpose MEMS devices based on thermopile sensors. In general, thermopile sensors response depends on ambient temperature, thermal conductivity of the gas inside the housing and the pressure of the gas. The presented model takes into account all these parameters. This model was sucessfully implemented for the study of transient behaviour of our multifunctional sensors with p+Si/Al thermocouples and a bulk micromachined bilayered membrane. Simulations were performed for different gases of interest and conclusions were deduced regarding the influence of relevant parameters on the thermal time constant. This analytical approach is general and flexible enough to be implemented for analysis of the transient behaviour of thermopile-based sensors when used for different applications.", publisher = "University of Banja Luka, Faculty of Electrical Engineering", journal = "Electronics", title = "Analytical modelling of the transient response of thermopile-based MEMS sensors", pages = "73-70", number = "2", volume = "19", doi = "10.7251/ELS1519070R", url = "conv_1185" }
Ranđelović, D.V., Kozlov, A.G., Jakšić, O.M., Smiljanić, M.M.,& Poljak, P.. (2015). Analytical modelling of the transient response of thermopile-based MEMS sensors. in Electronics University of Banja Luka, Faculty of Electrical Engineering., 19(2), 70-73. https://doi.org/10.7251/ELS1519070R conv_1185
Ranđelović D, Kozlov A, Jakšić O, Smiljanić M, Poljak P. Analytical modelling of the transient response of thermopile-based MEMS sensors. in Electronics. 2015;19(2):70-73. doi:10.7251/ELS1519070R conv_1185 .
Ranđelović, D.V., Kozlov, A.G., Jakšić, O.M., Smiljanić, M.M., Poljak, Predrag, "Analytical modelling of the transient response of thermopile-based MEMS sensors" in Electronics, 19, no. 2 (2015):70-73, https://doi.org/10.7251/ELS1519070R ., conv_1185 .